SEM Sputter Targets
                                                                                                                  
                                                                                           Proper Sputter Target Selection Guide 
sputter targers

Overview 

Rave Scientific offers high purity sputter targets which are compatible with a wide variety of desk top sputter coaters. The sputter coaters are used to sputter a very thin layer of conductive metal on a non-conductive sample in order to investigate these samples with a scanning electron microscope (SEM). Our sputter targets are compatible with the following sputter coaters,  ion beam coaters or cryo-SEM preparation systems brands

                        199912 001a Jumping Spider
Jumping Spider (Salticidae) gold/palladium coated. Courtesy of David Scharf, www.scharfphoto.com
  • Agar, Anatech/Technics
  • Bal-Tec, Bio-Rad
  • Cressington
  • Denton
  • Edwards, Emitech,
  • Gatan
  • Hummer
  • ISI
  • JEOL
  • Leica
  • Polaron
  • Quorum
  • Safematic, SPI
  • Thermo
  • VG Microtech

Targets are relatively expensive due to the high purity of the precious metals which require multiple refining steps. A purity of 99.99% or close is desired to avoid any artifacts either in imaging or with EDX analysis. The target material you are in your sputter coater may not be best choice. Keep in mind there is a wide variety of targets and alternatives for many applications. Depending on your application, there is a choice of coating materials, see:

Practical Information Selecting Target Material to Coat SEM Samples.

Our sputter targets are made using high purity metal foils and are available in 60, 57, 54, 50 and 19mm diameter. Disc type sputter targets are widely used is all brands of sputter coaters. The most modern sputter coaters use a clamping ring to hold the target. Some older systems use a target support plate where the target needs to be bonded with the target plate by using silver paint or Indium. Use the below  Disc Sputter Target Selection Table to determine the target size for your coater (alternatively measure the target in your sputter coater) or go directly to ordering information for the target size:

 

- Ø19mm disc type high purity sputter targets for Gatan ion beam sputter coaters                                                                          - Ø50mm disc type high purity sputter targets for sputter coaters  
- Ø57mm disc type high purity sputter targets for sputter coaters
- Ø54mm disc type high purity sputter targets for sputter coaters                                                                                                    - Ø60mm disc type high purity sputter targets for sputter coaters                                                                                                   - -Ø60mm disc type high purity sputter targets  on target holder for EMITECH and EMS sputter coaters
                                         

 sputter table

Rave Scientific 19mm Gatan Sputter Targets

sputter targers smallØ19mm disc type sputter targets for ion beam sputter coaters: Gatan Models 681 / 682 PECS and 685 PECS II.

Product Part Number Price
Silver Target, Ø19 x 1.5mm Disc, 99.99% Ag RS-RSI-70-AG1960 $365.00 each
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Aluminum Target, Ø19 x 1.5mm Disc, 99.999% Al RS-RSI-70-AL1960 $253.33 each
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Gold/Palladium Target, Ø19 x 1.5mm Disc, Au/Pd 60/40, 99.99% Au/Pd RS-RSI-70-AP1960 $1,194.00 each
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Gold Target, Ø19 x 1.5mm Disc, 99.99% Au RS-RSI-70-AU1960 $1,230.00 each
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Carbon (Graphite) Target, Ø19 x 1.5mm Disc, 99.99% C RS-RSI-70-CC1960 $198.00 each
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Chromium Target, Ø19 x 1.5mm Disc, 99.95% Cr RS-RSI-70-CR1960 $255.00 each
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Copper Target, Ø19 x 1.5mm Disc, 99.99% Cu RS-RSI-70-CU1960 $190.00 each
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Iridium Target, Ø19 x 1.5mm Disc, 99.99% Ir RS-RSI-70-IR1960 $3,348.00 each
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Niobium Target, Ø19 x 1.5mm Disc, 99.95% Nb RS-RSI-70-NB1960 $325.00 each
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Nickel Target, Ø19 x 1.5mm Disc, 99.98% Ni RS-RSI-70-NI1960 $255.00 each
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Palladium Target, Ø19 x 1.5mm Disc, 99.99% Pd RS-RSI-70-PD1960 $774.00 each
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Platinum/Palladium Target, Ø19 x 1.5mm Disc, Pt/Pd 80/20, 99.99% Pt/Pd RS-RSI-70-PP1960 $1,230.00 each
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Platinum Target, Ø19 x 1.5mm Disc, 99.99% Pt RS-RSI-70-PT1960 $1,302.00 each
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Tantalum Target, Ø19 x 1.5mm Disc, 99.95% Ta RS-RSI-70-TA1960 $325.00 each
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Tungsten Target, Ø19 x 1.5mm Disc, 99.95% W RS-RSI-70-WO1960 $325.00 each
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Rave Scientific 50mm Sputter Targets

sputter targers smallØ50mm disc type sputter targets for sputter coaters: SEC MCM 100 & 200, Anatech/Technics Hummer I / II /III, Fullam EffaCoater / EMS-76, SPI Super.

Product Part Number Price
Silver Target, Ø50 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG5010 $188.00 each
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Aluminum Target, Ø50 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL5010 $150.00 each
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Gold/Palladium Target, Ø50 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5004 $606.00 each
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Gold/Palladium Target, 50 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5005 $630.00 each
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Gold/Palladium Target, 50 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5008 $1,086.00 each
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Gold/Palladium Target, 50 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5009 $1,373.00 each
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Gold Target, 50 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU5004 $714.00 each
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Gold Target, 50 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU5008 $1,122.00 each
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Copper Target, 50 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU5010 $150.00 each
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Nickel Target, 50 x 0.075mm Disc, 99.98% Ni RS-RSI-70-NI5003 $175.00 each
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Palladium Target, 50 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD5004 $510.00 each
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Platinum/Palladium Target, Ø50 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5004 $720.00 each
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Platinum/Palladium Target, 50 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5008 $1,182.00 each
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Platinum Target, 50 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT5004 $738.00 each
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Platinum Target, Ø50 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT5008 $1,230.00 each
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Titanium Target, Ø50 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI5010 $140.00 each
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Rave Scientific 54mm Sputter Targets for Safematic/Leica/Baltec Coating Systems

sputter targers smallØ54mm disc type sputter targets for sputter coaters : Safematic, Bal-Tec SCD SCD005 / 040 / 050 / 500 / MD10 / MED20, LEICA EM SCD 005 / 050 / 500 / MED20 / ACE200 / ACE600, Emitech K575XD / K675X / K675XD.

Product Part Number Price
Gold Target, Ø54 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU5404 $595.00 each
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Gold Target, Ø54 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU5408 $1,185.00 each
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Gold Target, Ø54 x 0.3mm Disc, 99.99% Au RS-RSI-70-AU5412 $1,554.00 each
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Gold/Palladium Target, Ø54 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5404 $714.00 each
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Gold/Palladium Target, Ø54 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5408 $1,260.00 each
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Gold/Palladium Target, Ø54 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5405 $595.00 each
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Gold/Palladium Target, Ø54 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5409 $1,095.00 each
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Iridium Target, Ø54 x 0.3mm Disc, 99.99% Ir RS-RSI-70-IR5412 $5,495.00 each
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Platinum/Palladium Target, Ø54 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5404 $726.00 each
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Platinum/Palladium Target, Ø54 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5408 $1,188.00 each
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Palladium Target, Ø54 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD5404 $495.00 each
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Palladium Target, Ø54 x 0.2mm Disc, 99.99% Pd RS-RSI-70-PD5408 $1,295.00 each
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Palladium Target, Ø54 x 0.5mm Disc, 99.99% Pd RS-RSI-70-PD5410 $2,510.00 each
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Platinum Target, Ø54 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT5404 $744.00 each
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Platinum Target, Ø54 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT5408 $1,236.00 each
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Chromium Target, Ø54 x 0.5mm Disc, 99.95% Cr RS-RSI-70-CR5420 $495.00 each
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Titanium Target, Ø54 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI5410 $140.00 each
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Nickel Target, Ø54 x 0.075mm Disc, 99.98% Ni RS-RSI-70-NI5403 $175.00 each
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Silver Target, Ø54 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG5410 $275.00 each
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Copper Target, Ø54 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU5410 $160.00 each
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Aluminum Target, Ø54 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL5410 $150.00 each
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Aluminum Sputter Target 54mm x 1mm thick RS-SM-30089 $325.00 each
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Tungsten Sputter Target 54mm x 1mm thick RS-SM-30090 $250.00 each
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Zinc Target, Ø54 x 0.20mm Disc, 99.5% Zn RS-RSI-70-ZN5408 $45.00 each
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Zinc Target, Ø54 x 0.5mm Disc, 99.5% Zn RS-RSI-70-ZN5420 $55.00 each
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Iron Target, Ø54 x 0.1mm, 99.5% Fe RS-RSI-70-FE5404 $165.00 each
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Cobalt Target, Ø54 x 0.1mm Disc, 99.99% Cr RS-RSI-70-CO5404 $450.00 each
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Cobalt Target, Ø54 x 0.5 mm Disc, 99.99% Cr RS-RSI-70-CO5420 $475.00 each
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ITO target 54mm x 2mm thickness (ITO 90/10, 99.99% RS-SM-300012 $625.00 each
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Molybdenum Target 99.95% Pure 54mm Diameter x 0.2mm Thick RS-RSI-70- MO5408 $257.85 each
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Rave Scientific 57mm Sputter Targets for Cressington/Quorum/Agar/JEOL Coating Systems

sputter targers smallØ57mm disc type sputter targets for sputter coaters: Agar Manual / Auto, Cressington 108 / 108SE / 208HR, Emitech K575X / CS7620, SC7610, ISI 5400, JEOL JFC 1200 / 1300 / 1400 / 1600 / 2300HR, Pelco SC4 / SC5 / SC6 /SC7, Polaron 5000 / 5200 / 5400 / 5800, Quorum Q150 / Q300 / SC7620 and SPI Module.

Product Part Number Price
Gold Target, Ø57 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU5704 $720.00 each
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Gold Target, Ø57 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU5708 $1,380.00 each
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Gold Target, Ø57 x 0.3mm Disc, 99.99% Au RS-RSI-70-AU5712 $1,554.00 each
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Gold Target, Ø57 x 0.4mm Disc, 99.99% Au RS-RSI-70-AU5716 $2,034.00 each
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Gold/Palladium Target, Ø57 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5704 $714.00 each
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Gold/Palladium Target, Ø57 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5708 $1,260.00 each
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Gold/Palladium Target, Ø57 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5705 $714.00 each
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Gold/Palladium Target, Ø57 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP5709 $1,260.00 each
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Iridium Target, Ø57 x 0.3mm Disc, 99.99% Ir RS-RSI-70-IR5712 $5,695.00 each
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Platinum/Palladium Target, Ø57 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5704 $732.00 each
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Platinum/Palladium Target, Ø57 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP5708 $1,194.00 each
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Palladium Target, Ø57 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD5704 $750.00 each
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Palladium Target, Ø57 x 0.2mm Disc, 99.99% Pd RS-RSI-70-PD5708 $1,290.00 each
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Platinum Target, Ø57 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT5704 $865.00 each
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Platinum Target, Ø57 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT5708 $1,035.00 each
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Platinum Target, Ø57 x 0.3mm Disc, 99.99% Pt RS-RSI-70-PT5710 $1,446.00 each
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Molydenum Target, Ø57 x 0.25mm Disc, 99.95% Mo RS-RSI-70-MO5710 $286.50 each
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Tungsten Target, Ø57 x 0.25mm Disc, 99.95% W RS-RSI-70-WO5710 $245.00 each
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Titanium Target, Ø57 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI5710 $140.00 each
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Tantalum Target, Ø57 x 0.25mm Disc, 99.95% Ta RS-RSI-70-TA5710 $290.00 each
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Nickel Target, Ø57 x 0.075mm, 99.98% Ni RS-RSI-70-NI5703 $175.00 each
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Niobium Target, Ø57 x 0.25mm Disc, 99.95% Nb RS-RSI-70-NB5710 $205.00 each
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Silver Target, Ø57 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG5710 $175.00 each
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ITO (Indium Tin Oxide) Target Ø57 x 3.0mm Disc, including 1mm thick copper backing plate, 90/10 Wt% In2O3/SnO2, 99.99% RS-RSI-70-IT7099 $1,050.00 each
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Copper Target, Ø57 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU5710 $195.00 each
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Chromium Target, Ø57 x 3.2mm Disc, 99.95% Cr RS-RSI-70-CR5799 $550.00 each
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Chromium Target, Ø57 x 0.3mm Disc, 99.95% Cr RS-RSI-70-CR5712 $490.00 each
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Aluminum Target, Ø57 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL5710 $150.00 each
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Zinc Target, Ø57 x 0.20mm Disc, 99.5% Zn RS-RSI-70-ZN5708 $150.00 each
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Zinc Target, Ø57 x 0.5mm Disc, 99.5% Zn RS-RSI-70-ZN5720 $165.00 each
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Cobalt Target, Ø57 x 0.1mm Disc, 99.99% Co RS-RSI-70-CO5704 $495.00 each
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Cobalt Target, Ø57 x 0.5 mm Disc, 99.99% Co RS-RSI-70-CO5720 $515.00 each
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Iron Target, Ø57 x 0.1mm, 99.5% Fe RS-RSI-70-FE5704 $175.00 each
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Tin Target 99.99% Pure 54mm Diameter x 0.2mm Thick RS-RSI-70-TI5408 $195.00 each
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Molydenum Target, Ø57 x 0.25mm Disc, 99.95% Mo RS-RSI-70-MO5710_copy2029396150 $286.50 each
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Rave Scientific 60mm Sputter Targets for Denton/Emitech Coating Systems

sputter targers smallØ60mm disc type sputter targets for sputter coaters: Denton Desk II / III / IV /V, Edwards 150B / Scancoat, Emitech K500 / K550 / K650 and Emscope SC500.

Product Part Number Price
Gold Target, Ø60 x 0.1mm Disc, 99.99% Au RS-RSI-70-AU6004 $749.50 each
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Gold Target, Ø60 x 0.2mm Disc, 99.99% Au RS-RSI-70-AU6008 $1,445.00 each
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Gold/Palladium Target, Ø60 x 0.1mm Disc, Au/Pd 60/40, 99.99% Au/Pd RS-RSI-70-AP6004 $775.00 each
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Gold/Palladium Target, Ø60 x 0.2mm Disc, Au/Pd 60/40, 99.99% Au/Pd RS-RSI-70-AP6008 $1,640.00 each
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Gold/Palladium Target, Ø60 x 0.1mm Disc, Au/Pd 80/20, 99.99% Au/Pd RS-RSI-70-AP6005 $895.00 each
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Gold/Palladium Target, Ø60 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd RS-RSI-70-AP6009 $1,350.00 each
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Iridium Target, Ø60 x 0.3mm Disc, 99.99% Ir RS-RSI-70-IR6012 $5,275.00 each
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Platinum/Palladium Target, Ø60 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP6004 $895.00 each
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Platinum/Palladium Target, Ø60 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd RS-RSI-70-PP6008 $1,495.00 each
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Palladium Target, Ø60 x 0.1mm Disc, 99.99% Pd RS-RSI-70-PD6004 $925.00 each
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Palladium Target, Ø60 x 0.2mm Disc, 99.99% Pd RS-RSI-70-PD6008 $1,495.00 each
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Platinum Target, Ø60 x 0.1mm Disc, 99.99% Pt RS-RSI-70-PT6004 $865.00 each
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Platinum Target, Ø60 x 0.2mm Disc, 99.99% Pt RS-RSI-70-PT6008 $1,275.00 each
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Silver Target, Ø60 x 0.25mm Disc, 99.97% Ag RS-RSI-70-AG6010 $245.00 each
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Nickel Target, Ø60 x 0.075mm Disc, 99.98% Ni RS-RSI-70-NI6003 $180.00 each
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Copper target, Ø60 x 0.25mm Disc, 99.99% Cu RS-RSI-70-CU6010 $175.00 each
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Aluminum Target, Ø60 x 0.25mm Disc, 99.999% Al RS-RSI-70-AL6010 $150.00 each
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Chromium Target, Ø60 x 0.3mm Disc, 99.95% Cr RS-RSI-70-CR6012 $575.00 each
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Titanium Target, Ø60 x 0.25mm Disc, 99.6+% Ti RS-RSI-70-TI6010 $145.00 each
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Rave Scientific Ø60mm high purity EM-Tec sputter targets on target holder for Emitech and EMS sputter coaters

sputter targers smallØ60mm high purity EM-Tec sputter targets on target holder for Emitech K500X, K550X and K650X and EMS sputter coaters

Rave Scientific 82mm Annular Targets

sputter targers smallØ82mm OD x Ø60mm ID annular type sputter targets for sputter coaters: Polaron / Biorad E5100 / SC510 / SC515 and Polaron / Quorum SC7640 / 7680.

Rave Scientific 3inch Annular Targets

sputter targers smallØ3 OD x Ø2 ID annular type sputter targets for sputter coaters: Anatech / Technics Hummer V / VI / 6.2 / 8.